Product: VV-01 vacuum 2-way ball valve (SUS316 3PC, NW16~NW100)
Supplied to: Samsung Electronics and SK hynix semiconductor processes, Samsung Display
Quality: made in Taiwan, every unit helium leak tested before shipment
Seal: low-outgassing FKM (Viton)
Handle: patented locking structure that stays locked even in vertical installation
Actuation: manual VV-01, electric VVE-09, pneumatic VVP-01 (double acting) and VVP-02 (single acting)
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In the vacuum piping of semiconductor and display processes, a leak in a single isolation valve affects the vacuum level of the whole line, so the valve's supply record and inspection standard are checked together. VV-01 is an SUS316 vacuum 2-way ball valve that is steadily supplied to the semiconductor processes of Samsung Electronics and SK hynix and is also supplied to Samsung Display.
A ball valve continuously supplied to semiconductor and display vacuum lines
VV-01 vacuum 2-way ball valve with a lever handle
VV-01 has a 3PC structure with the body split into three pieces, so the seat and seals can be replaced by removing only the center body without detaching the two end pieces from the piping. It ships with internal oil removed (Clean & Oil Free).
| Item | Specification |
|---|---|
| Body Material | SUS316 (CF8M), 3PC |
| Ball Material | SUS316 |
| Connection | KF flange for NW16~NW50, ISO flange for NW63~NW100 |
| Seat | PTFE |
| Seal | FKM (Viton) |
| Vacuum Level | 1×10⁻⁵ Torr |
| Helium Leak Rate | 1×10⁻⁹ atm·cc/sec |
| Mounting Pad | ISO 5211 direct mounting pad |
| Handle | Lever with locking device |
Body: SUS316 (CF8M), 3PC
Ball: SUS316
Connection: NW16~NW50 KF flange, NW63~NW100 ISO flange
Seat: PTFE, seal: FKM (Viton)
Vacuum level: 1×10⁻⁵ Torr
Helium leak rate: 1×10⁻⁹ atm·cc/sec
Mounting pad: ISO 5211 direct mounting pad
Handle: lever with locking device
The top has an ISO 5211 direct mounting pad, applied for the first time in Korea, so an actuator (the device that drives the valve) can be mounted directly without a bracket.
NW flange connections and the 3PC body
Seals in vacuum piping must release little gas from their material to hold the vacuum level, so VV-01 uses FKM (Viton, a fluoroelastomer) for its seals. It is produced at a factory in Taiwan, and only units that pass a helium leak test, applied to every unit, are shipped.
Compared with general market products of the same size, the difference shows more clearly the longer the valve is in service.
| Item | VV-01 | General market products |
|---|---|---|
| Production and inspection | Made in Taiwan, helium leak test on every unit | Inspection scope varies by maker and lot |
| Seal material | FKM (Viton) | Material marking needs to be checked |
| Service life | Keeps leak performance for a long time under repeated opening and closing | Leaks during use can shorten the replacement interval |
| Locking handle | Patented structure that holds even in vertical installation | Locking structure needs to be checked |
| Supply record | Samsung Electronics, SK hynix, Samsung Display | Needs to be checked individually |
1️⃣ Production and inspection: made in Taiwan, helium leak test on every unit
2️⃣ Seal material: FKM (Viton)
3️⃣ Service life: keeps leak performance for a long time under repeated opening and closing
4️⃣ Locking handle: patented structure that holds even in vertical installation
5️⃣ Supply record: Samsung Electronics, SK hynix, Samsung Display
Vacuum valve cost looks different once the replacement interval is counted
The unit price alone may differ, but once you add the cost of stopping the line for a leak and replacing the valve, a product with a longer life comes out ahead.
The VV-01 handle uses a patented locking structure (Patent No. 10-2594296). With a conventional locking structure, once the valve has been installed on vertical piping for some time, the locking device slides down, and the handle can turn and change the valve opening.
In the patented structure, a spring holds the locking device in place, so the lock does not release and the opening is kept even after vertical installation. It also keeps the handle from turning under equipment vibration or repeated operation, which helps prevent the vacuum line from opening or closing unintentionally.
VV-01 handle with the locking device under the lever
VV-01 comes in a manual version with a lever handle and a bare version supplied as the body only without a handle, and the electric and pneumatic models are the same body with an actuator mounted on top.
| Positions opened and closed by hand on site, or lines planned for later automation | VV-01 Manual, Bare |
| Positions driven by electricity without air piping, or lines that need opening control | VVE-09 Electric |
| Repeated automatic shutoff that opens and closes with air | VVP-01 Pneumatic, double acting |
| Lines that must close when air is lost | VVP-02 Pneumatic, single acting |
VV-01 bare version supplied as the body only, without a handle
The electric VVE-09 comes standard with 220VAC single-phase power. If you need a different power supply or proportional control that adjusts the opening with a 4~20mA or 0~10VDC signal, please contact us.
VVE-09 with an electric actuator mounted
The pneumatic version comes in two models by actuation type. VVP-01 is double acting, supplying air both to open and to close, and VVP-02 is single acting, with a spring that returns the valve, so it goes back to the closed position when air is lost.
VVP-01 with a double acting pneumatic actuator mounted
VVP-02 with a single acting (spring return) pneumatic actuator mounted
Q. Can a valve used manually be converted to automatic later?
Yes. Leave the body as it is and mount an electric or pneumatic actuator in place of the handle.
Q. What happens to the double acting VVP-01 when the air supply is lost?
It does not return to a set position, because a double acting actuator has no return spring. If the line must be closed when air is lost, choose the single acting VVP-02.
Q. Can it be used on ultra-high vacuum lines?
We do not recommend it as is. VV-01 is for isolation on general high vacuum lines with a vacuum level of 1×10⁻⁵ Torr, and ultra-high vacuum (UHV) lines need a separate review of the operating conditions.
Tell us the items below and we can start reviewing the specification.
1️⃣ Connection: NW size of the existing piping (NW16~NW100)
2️⃣ Actuation: which you need among manual, bare, electric and pneumatic
3️⃣ For electric: site power supply and whether proportional control is needed
4️⃣ For pneumatic: double or single acting, and accessories to add such as limit switches
5️⃣ Operating conditions: gas flowing through, temperature and target vacuum level
When replacing an existing valve, please also send the current model name or a photo.
▸ View product: VV-01 vacuum 2-way ball valve
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