Model: RC2000
The clean regulator has oil-free specifications and a stainless steel body. It is suitable for clean air and N2 pressure control in semiconductor and liquid crystal manufacturing equipment.
| Operating Fluid | Compressed air, N2 |
| Max operating pressure (MPa) | 1.0 (0.5 for low pressure type) |
| Proof Pressure (MPa) | 1.5 |
| Ambient/Fluid Temperatures (°C) | 5 to 60 |
| Set Pressure Range: Standard (MPa) | 0.05 to 0.7 |
| Set Pressure Range: Low Pressure (MPa) | 0.02 to 0.2 |
| Port size (IN/OUT): RC2000-8-P90 | Rc1/4 |
| Port size (IN/OUT): RC2000-10-P90 | Rc3/8 |
| Port size (IN/OUT): RC2000-15-P90 | Rc 1/2 |
| Pressure gauge port size | Rc1/8 |
| Gas-wetted Materials: Metal | SS316 |
| Gas-wetted Materials: Resin | PTFE |
| Gas-wetted Materials: Rubber | FKM |
| Assembly/Inspection/Packaging | Integrated Production in Clean Room |
| Washing (Wetted parts) | Precision cleaning |
| Weight: RC2000-8-P90 (kg) | 0.47 |
| Weight: RC2000-10-P90 (kg) | 0.45 |
| Weight: RC2000-15-P90 (kg) | 0.59 |