Model: PGM
This process gas regulator uses a metal diaphragm. Fitting and integrated types are available, with stable pressure control at very small flow rates.
| Applicable Fluid | Inert gas / Process gas |
| Max. working pressure (MPa) | 1.0 |
| Setting Pressure (30V, MPa) | -0.07 to 0.21 |
| Setting Pressure (30, MPa) | 0 to 0.21 |
| Setting Pressure (50, MPa) | 0 to 0.35 |
| Setting Pressure (60, MPa) | 0 to 0.42 |
| Setting Pressure (100, MPa) | 0 to 0.7 |
| Fluid temperature (°C) | -5 to 40 (2H is 20 to 50) |
| Valve Seat Leakage (Pa·m³/s (He)) | 1.0x10-8 or less (2 H is 2.0x10-8 or less) |
| External Leakage (Pa·m³/s (He)) | 2.8x10-12 or less |
| Proof Pressure (MPa) | 1.5 |
| Storage Ambient Temperature (°C) | -5 to 60 |
| Gas-wetted Surface Treatment | Electrolytic polishing specification |