| Valve Seat Leakage | 1.3×10^-10 Pa·m3/s (He) or less |
| External Leakage | 1.3×10^-11 Pa·m3/s (He) or less |
| Fluid Temperature | 5 to 60 °C |
| Ambient Operating Temperature | 5 to 50 °C (no condensation or freezing) |
| Working Fluid | Vacuum and inert gas |
| Working Pressure | 1.3×10^-6 to 1×10^5 Pa (abs) |
| Max. Working Differential Pressure | 0.1 MPa |
| Proof Pressure | 0.3 MPa |
| Specifications by Model | EVB317: orifice ø24, connection NW25, conductance 13 l/s, resolution 0.15 mm, repeatability 0.10 mm, weight 1.1 kg; EVB417: ø39, NW40, 43 l/s, 0.30 mm, 0.15 mm, 2.6 kg; EVB517: ø48, NW50, 74 l/s, 0.40 mm, 0.20 mm, 3.3 kg |
| Material | Body A6063, bellows SS316L, valve disc SS316L, rod cap/skirt/washer/nut SS304, O-ring FKM |
