Ebara EST Harsh Process Dry Vacuum Pump

Ebara EST Harsh Process Dry Vacuum PumpEbara EST Harsh Process Dry Vacuum Pump 2

Specifications

Ultimate Pressure (Pa/mbar)2.7/2.7e-2, 2.7/2.7e-2, 0.4/4e-3, 0.4/4e-3, 0.4/4e-3, 0.4/4e-3 (in the order EST10N / 25N / 100WN / 200WN / 300WN / 500WN)
ModelEST10N, EST25N, EST100WN, EST200WN, EST300WN, EST500WN
Pumping Speed1,000 / 2,500 / 10,000 / 20,000 / 30,000 / 50,000 l/min (m3/h: 60 / 150 / 600 / 1,200 / 1,800 / 3,000) (in the order EST10N / 25N / 100WN / 200WN / 300WN / 500WN)
Power at Ultimate Pressure2.3 / 3.0 / 3.2 / 3.2 / 4.5 / 4.6 kW (in the order EST10N / 25N / 100WN / 200WN / 300WN / 500WN)
Cooling Water Flow5 - 8 l/min (all models)

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