| Ultimate Pressure (Pa/mbar) | EV-M20N 5/5e-2; other six models 0.5/5e-3 |
| Model | EV-M20N, EV-M102N, EV-M202N, EV-M302N, EV-M502N, EV-M802N, EV-M1205N |
| Power at Ultimate Pressure | 1.2 / 1.8 / 1.9 / 2.3 / 2.1 / 2.8 / 5.3 kW (in the order EV-M20N / M102N / M202N / M302N / M502N / M802N / M1205N) |
| Cooling Water Flow | 3-8 / 3-8 / 3.5-8 / 4-8 / 5-8 / 5-8 / 5-8 l/min (in the order EV-M20N / M102N / M202N / M302N / M502N / M802N / M1205N) |
| PUMPING SPEED | 110 / 600 / 1,200 / 1,800 / 3,000 / 4,800 / 6,600 m³/h (in the order EV-M20N / M102N / M202N / M302N / M502N / M802N / M1205N) |
| N2 purge flow | 26~31 / 26~31 / 26~81 / 26~31 / 28~33 / 28~33 / 34~35 Pa·m³/s (in the order EV-M20N / M102N / M202N / M302N / M502N / M802N / M1205N) |
| Weight | 170 / 320 / 360 / 400 / 500 / 740 / 870 kg (in the order EV-M20N / M102N / M202N / M302N / M502N / M802N / M1205N) |
| Cooling method | Water cooled |