Ebara MK Magnetically Levitated Turbomolecular Pump
Specifications
Pumping Speed (N2)
1650~4200 L/sec (by model)
Maximum Compression Ratio (N2)
>2x10^8 (varies by model)
Base Pressure
<2x10^-7 Pa (<5x10^-7 Pa for EMT3804MK/EMT4204MK)
Rated Rotational Speed
24000~27000 min-1
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Ebara MK Magnetically Levitated Turbomolecular Pump
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