BPG400 is a combination vacuum gauge with a Bayard-Alpert hot cathode sensor and a Pirani sensor in one body. It measures from ultra-high vacuum to atmosphere, protects the filament using the Pirani reading and serves semiconductor process and transfer chambers.
| Measuring Range | 5×10⁻¹⁰ … 1000 mbar (3.8×10⁻¹⁰ … 750 Torr) |
| Accuracy (10⁻⁸…10⁻² mbar) | ±15% of reading |
| Supply Voltage | +20…+28/0.8V/A(dc) |
| Maximum Pressure | 2 bar |
| Protection Rating | IP30 |
| Bakeout | Flange (with extension) 150°C, without extension 80°C, 150°C with electronics removed |
| Operating Temperature | 0…+50°C |
| Repeatability | 5% (10⁻⁸…10⁻² mbar) |
| Interface | RS232C (optional DeviceNet, Profibus DP) |
| Dimensions | 67×58×153 mm (flange height DN25 KF 42, DN40 CF 48) |