HPG400 is a combination vacuum gauge with a high-pressure hot ionization sensor and a Pirani sensor in one body. It measures from high vacuum to atmosphere and is especially suited to repeatable measurement of sputter process pressure.
| Measuring Range | 2×10⁻⁶ … 1000 mbar (1.5×10⁻⁶ … 750 Torr) |
| Accuracy (10⁻⁵…1mbar) | ±15% of reading |
| Supply Voltage | 20…28 V/0.8A(dc) |
| Maximum Pressure (absolute) | 2 bar |
| Protection Rating | IP30 |
| Repeatability | 2% (10⁻⁵…10⁻¹ mbar), 30% (10⁻¹…100 mbar) |
| Hot-ion Switch-on Pressure | Selectable 1, 5×10⁻¹, 2×10⁻¹, 1×10⁻¹, 5×10⁻² mbar |
| Operating Temperature | 0…+50 °C |
| Bakeout | Flange 80°C, 150°C with electronics removed |
| Interface | RS232C (HPG400-SP Profibus DP, HPG400-SD DeviceNet) |
| Dimensions | 67 x 58 x 153 mm |
| Weight | KF 430 g, CF 695 g |