PSG50x is a compact Pirani vacuum gauge using digital Pirani technology. With a stainless steel measuring cell and a logarithmic output signal, it serves pressure monitoring and safety circuits on semiconductor equipment and vacuum lines.
| Measuring Range | 5×10⁻⁴ … 1000 mbar |
| Accuracy (1×10⁻³…100mbar) | ±15% of reading |
| Supply Voltage | +14…+30 V (dc) |
| Allowable Pressure (absolute) | 10 bar, limited to inert gases |
| Repeatability | 2% (of reading, air, 1×10⁻³…100 mbar) |
| Operating Temperature | +5…+60°C |
| Storage Temperature | -20…+65°C |
| Vacuum Connection Temperature | 80°C / 250°C (long tube) |
| Protection Rating | IP40 |
| Weight | 70…140 g (by flange) |