INFICON VSA100A Vacuum Switch

VSA100A is a safety vacuum switch for rough vacuum systems. At 6 mbar below atmosphere its diaphragm changes over the contact, so it can cut gas supply during venting and suits load-lock control.

INFICON VSA100A Vacuum SwitchINFICON VSA100A Vacuum Switch 2

Specifications

Switching Pressure6 ± 2 mbar (below atmosphere)
Back Switching Pressure3 ± 2 mbar (below atmosphere)
Working Pressure (absolute)<2 bar
Operating Temperature (in operation)0 … +85 °C
Switching ContactChange over contact, 24 V (dc) / 24 V (ac)
Flange ConnectionDN 16 ISO-KF
Materials Exposed to VacuumStainless steel 1.4305, EPDM, PTFE
Protection RatingIP 44
Weight315 g
Contact Currentmax. 30 mA (24 V dc), 100 mA (24 V ac), min. load 1 mA (gold-plated contacts)
Helium Permeation5×10⁻⁵ mbar l/s (EPDM diaphragm, not suitable for high-helium processes)
Mounting OrientationVertical (upright)
Internal Volume2 cm³
Storage Temperature-20 … +85 °C
Dimensionsheight 72 mm, outer diameter ø48.5 mm