| Body/Bellows Material | 1.4943 (AISI 660) or 1.4404 (AISI 316L) |
| Valve Disc Seal Material | Diaphragm 1.4310 (AISI 301), gold-plated |
| Leak Rate | ≤1×10⁻¹⁰ mbar x l/s |
| Bake Temperature | ≤300℃ |
| Connection Flange | DN 16 CF-R |
| Molecular Conductance | 0.05 L/s |
| Adjustable Gas Flow | 1×10⁻¹⁰ to 500 mbar·l/s (air, 1 bar, room temperature) |
| Dead Volume | Seat port 2.7 / side port 1.1 cm³ |
| Pressure Range | UHV to 10 bar (abs) |
| Test Pressure | 1 bar |
| Differential Pressure | ≤10 bar |
| Cycles until First Maintenance | 20 000 cycles |
| Radiation Resistance | 10⁸ Gy (10¹⁰ rad) |
| Turns to Open/Close | 22 |
| Weight | 0.94 kg (2.07 lbs) |
