| Flow Range (N2 equiv.) | 100~200 SLM |
| Flow Control Range | 2~100% of Full Scale |
| Accuracy | ≤±2.0% of Full Scale |
| Linearity | ≤±0.5% of Full Scale |
| Repeatability | ≤±0.2% of Full Scale |
| Working Pressure | Inquiry |
| Operating Temperature | 0~50°C (guaranteed accuracy 15~35°C) |
| Leak Rate | 1x10^-8 Pa.m3/sec (He) |
| Power Supply | +15Vdc or +24Vdc / Max. 300mA |
| Output Signal | 0~5Vdc or 4~20mA |
| Seal Material | FKM (Viton)/H-NBR(Buna)/FFKM(Kalrez)/Teflon/EPDM |
| Fittings | LOK 1/4",3/8",1/2" VCR 1/4",1/2" |
| Interface | Analog |
| Main Parts Material | SS316L |