Vacuum Pneumatic KF In-Line Valve (SUS304, Single Acting, Bellows Seal)

Model: PVVP-07(S)

PVVP-07(S) is a vacuum in-line valve combining a bellows-seal construction with a pneumatic single-acting actuator. It supports sizes from NW16 up to NW160 and undergoes 100% helium leak testing prior to shipment, and is used for fail-safe automatic line on/off in semiconductor, display, solar, and laboratory processes.

Features

• Compact design for easy installation in confined spaces
• Internal oil removal (CLEAN AND OIL FREE)
• 100% helium leak tested
• Custom manufacturing available per customer needs
• Available in sizes NW16-160
• Bellows seal with high tightness and durability

Specifications

Frequently Asked Questions

How is the fail-safe direction of a single-acting valve determined?

Single-acting valves automatically return to Fail Close or Fail Open when pneumatic pressure is lost. Choose Fail Close for lines where chamber contamination must be prevented, and Fail Open for lines where pump connection must be maintained. Decide based on the results of the process hazard analysis (HAZOP).

What advantages does a bellows seal provide in vacuum lines?

A bellows seal encloses the entire stem in a metal corrugated tube, minimizing contact with outside air. It is structurally less affected by seal aging in repeated-use environments and provides margin in inspection cycle planning even in corrosive gas environments.

What accessories can be attached to pneumatic valves?

We can supply integrated packages combining limit switch boxes, solenoid valves, and air filter regulators tailored to site requirements.

Up to what vacuum level can it be used?

PVVP-07(S) is designed for fail-safe automatic shutoff in the high vacuum (HV) range. Environments requiring ultra-high vacuum (UHV) need separate specification review.