Vacuum Pneumatic KF Right Angle Valve (SUS304, Double Acting, Bellows Seal)

Model: PVVP-06(D)

PVVP-06(D) is a vacuum right-angle valve combining a bellows-seal construction with a pneumatic double-acting actuator. It supports a wide size range from NW16 up to NW320 and undergoes 100% helium leak testing prior to shipment, and is used for automatic chamber-isolation and pump-shutoff lines requiring high-speed response in semiconductor, display, solar, and laboratory processes.

Features

• Compact design for easy installation in confined spaces
• Internal oil removal (CLEAN AND OIL FREE)
• 100% helium leak tested
• Custom manufacturing available per customer needs
• Available in large sizes NW16-320
• Bellows seal with high tightness and durability

Specifications

Frequently Asked Questions

How do I choose between double-acting and single-acting?

Double-acting offers fast response and large torque margin, suited for high-frequency automatic control and sequence control; however, position retention is uncertain when pneumatic pressure is lost. Single-acting (spring return) enables fail-safe return when air is lost, making it suitable for safety shutoff lines where chamber contamination prevention is critical. Choose double-acting when high-speed automatic control takes priority, single-acting when safety shutoff is the priority.

What advantages does the bellows seal provide in vacuum lines?

Standard O-ring seals have the stem in direct contact with the atmosphere, so micro-leakage may increase due to repeated operation and hardening. Bellows seals wrap the entire stem with a metal bellows, minimizing contact with the atmosphere, structurally reducing the impact of seal aging in repetitive use environments and securing margin in inspection cycle planning for corrosive gas environments.

What does the wide size range of NW16 to 320 mean?

PVVP-06(D) supports a size range from NW16 for small bench-scale equipment to NW320 for pilot and production-scale large-diameter exhaust lines. The same product line maintains specification consistency even as equipment scale expands, advantageous for maintenance standardization in fabs and laboratories with multiple equipment.

What accessories can be attached to a pneumatic valve?

We supply integrated packages combining various accessories to meet field requirements. Typical accessories include limit switch boxes (open/close feedback), solenoid valves (remote sequence control), and air filter regulators (supply air purification/pressure stabilization). Let us know your field configuration and we will prepare the appropriate combination.