Model: AMD※1H
This air operated valve supports high pressure and high back pressure in chemical liquid lines in semiconductor manufacturing. The standard type has working pressure and back pressure ranges of 0 to 0.7 MPa.
| Actuation | NC (normally closed) |
| Working fluid | Chemical liquids, pure water, air, N2 gas |
| Fluid temperature (°C) | 5 to 40 |
| Proof pressure (MPa) | 1.4 |
| Working pressure (A→B) (MPa) | 0 to 0.7 |
| Valve seat leakage (cm3/min) | 0 (water pressure) |
| Back pressure (MPa) | 0 to 0.7 |
| Ambient temperature (°C) | 0 to 40 |
| Frequency | 15 cycle/min. or less |
| Mounting orientation | Unrestricted |
| Operating pressure (MPa) | 0.5 to 0.7 |
| Operating port | Rc1/8 |
| Weight (kg): AMD41H | 0.56 |
| Weight (kg): AMD51H | 1.1 |
| Weight (kg): AMD61H | 1.3 |