Model: MMD※0M
This metal-free manual valve supports hydrochloric acid and hydrofluoric acid lines in semiconductor manufacturing. The series includes MMD30M and MMD50M.
| Working fluid | Chemical liquids, pure water, air, N2 gas |
| Fluid temperature (°C) | 5 to 40 |
| Proof pressure (MPa) | 1.0 |
| Working pressure (A→B) (MPa) | 0 to 0.5 |
| Valve seat leakage (cm3/min) | 0 (water pressure) |
| Back pressure (MPa) | 0 to 0.5 |
| Ambient temperature (°C) | 0 to 40 |
| Mounting orientation | Unrestricted |