Model: FSM3-P70 / FSM3-P80
This compact RAPIFLOW flow rate sensor offers P70 and P80 cleanroom specifications. The resin-body LCD model includes gas type selection and flow rate integration functions.
| Display | 4 digit + 4 digit 2 color LCD |
| Fluid temperature range | 0 to 50°C (no condensation) |
| Operating ambient temperature / humidity | 0 to 50 °C, 90% RH or less |
| Current consumption | 45 mA or less |
| Degree of protection | IP40 or equivalent (IEC standard) |
| Mounting orientation | Unrestricted in vertical/horizontal direction |
| Straight piping section | Not required |
| Proof pressure | 1 MPa |
| Storage temperature | −10 to 60°C |
| Response time | 50 msec or less (setting response time OFF) |
| Power supply voltage, voltage output | 12 to 24 VDC (10.8 to 26.4 V) ripple rate 1% or less |
| Power supply voltage, current output | 24 VDC (21.6 to 26.4 V) ripple rate 1% or less |
| Working pressure range | −0.09 to 0.75 MPa |