A custom vacuum module that HTC designs to the customer's requirements, then assembles and tests. It combines the vacuum chamber, frame, vacuum pump, piping and controls for vacuum exhaust, substrate degassing or inspection in vacuum.
| Configuration | Vacuum chamber, frame, vacuum pump, vacuum piping, control system |
| Application | Vacuum exhaust, substrate degassing, inspection in vacuum |
| Examples | Evaporation and polymerization system, cluster transfer system for flexible substrate coating, thin film solar cell sputtering PVD, cutting tool PVD coating, UHV system for surface analysis |
| Manufacturing | Custom design to customer specification, assembled and tested by HTC |