The UL3000 Fab is a mobile helium leak detector developed for leak checking of semiconductor and display manufacturing tools. It features the MASSIVE function that finds large leaks before pump-down, the fast I-CAL measuring algorithm and a three-year ion source warranty; the Fab ULTRA adds HYDRO·S water vapor background suppression and faster evacuation.
| Models | UL3000 Fab / UL3000 Fab ULTRA |
| Min. Detectable Leak Rate for Helium (Vacuum Method) | Less than 5×10⁻¹² mbar l/s |
| Min. Detectable Leak Rate for Helium (Sniffer Mode) | Less than 5×10⁻⁸ mbar l/s |
| Max. Inlet Pressure (MASSIVE Mode) | 1000 mbar |
| Pumping Speed During Evacuation | UL3000 Fab more than 32 m³/h / UL3000 Fab ULTRA more than 36 m³/h |
| Helium Pumping Speed (High Sensitive Mode ULTRA) | 4 l/s |
| Response Time | Less than 1 s |
| Time Until Ready for Operation | Less than 3 min |
| Detectable Masses (ULTRATEST Sensor Technology) | 2, 3, 4 (H₂, ³He, He) |
| Ion Source | 2 filaments, iridium/yttria oxide coated (3 year warranty) |
| Test Port | DN 25 KF |
| Adjustable Triggers | 4 |
| Interface | 2 × USB, Ethernet / LAN |
| Supply Voltage | 100 to 240 V 50/60 Hz (AC) |
| Power Consumption | Typ. 700 VA, max. 1500 VA |
| Dimensions (L × W × H) | 1050 × 472 × 987 mm (42 × 21 × 34 in.) |
| Weight | UL3000 Fab 118 kg / UL3000 Fab ULTRA 132 kg |
| Permissible Ambient Temperature Range (During Operation) | 10 to 40 °C |
| Additional Features | UL3000 Fab ULTRA only: HYDRO·S, separate sniffer line SL3000 port |
| Display and Operation | Intuitive user guidance with touch display, rotatable full color high resolution display, remote control by mobile device via Wi-Fi, data storage capability, data export using USB stick (access controlled) |
| Main Functions | I-CAL software algorithm (fast measurements in the range of 10⁻⁹ to 10⁻¹² mbar l/s), I·ZERO 2.0 background suppression, MASSIVE leak function for early detection of large leaks |