The UL5000 is a mobile helium leak detector for semiconductor, flat panel display and solar cell manufacturing and for testing vacuum equipment. The I·CAL algorithm, HYDRO·S (hydrogen suppression) and a booster turbomolecular pump bring the unit to test conditions quickly, and the rotatable display and optional wireless remote control make it easy to use.
| Smallest Detectable Leak Rate (Vacuum Mode) | Less than 5×10⁻¹² mbar·l/s |
| Min. Detectable Leak Rate for Helium (Sniffer Mode) | Less than 5×10⁻⁸ mbar·l/s |
| Largest Detectable Leak Rate for Helium | 30 mbar l/s |
| Max. Inlet Pressure (GROSS Mode) | 15 mbar |
| Start-up Time | Less than 4 min |
| Pumping Speed During Evacuation | 25 m³/h (17.6 cfm) |
| He Pumping Speed (ULTRA Mode) | More than 20 l/s (in ULTRA mode) |
| Time Until Ready for Leak Check (Leak Rates in the Range of 10⁻⁹ mbar l/s, with HYDRO·S) | At the inlet (without test volume) less than 10 sec / with test volume 50 l less than 150 sec |
| Venting Time (With Test Volume 100 l) | Approx. 25 sec |
| Detectable Masses (ULTRATEST Sensor Technology) | 2, 3, 4 (H₂, ³He, He) |
| Sensor | 180° mass spectrometer, all components made of stainless steel, ion source with 3 year warranty |
| Supply Voltages | 100 V, 115 V, 230 V, 1200 VA (ordering versions: 230 V 50 Hz / 100/115 V 50/60 Hz) |
| Weight | 140 kg (308 lb.) |
| Dimensions, Incl. Handle (L × W × H) | 1080 × 530 × 1083 mm (42.5 × 21 × 42.6 in.) |
| Main Functions | I·CAL fast detection algorithm, HYDRO·S (hydrogen suppression) to reach test conditions quickly, selectable background suppression (I·ZERO), booster turbomolecular pump, built-in test leak with auto calibration |
| Display and Operation | Rotatable display (digital, bar graph, trend or circular modes), Start / Zero / Stop buttons. Options: remote control RC1000WL (wireless, touch screen), RC1000C (wired) |