Model: UL6000 Fab
The UL6000 Fab is a helium leak detector for leak testing large chambers and piping of semiconductor tools. ULTRATEST sensor technology detects hydrogen (mass 2) and helium (masses 3 and 4), and MASSIVE mode allows testing at atmospheric pressure. It is available as Fab and Fab PLUS.
| Min. Detectable Leak Rate (Vacuum Method) | <5x10-12 mbar·L/s |
| Min. Detectable Leak Rate (Sniffer Mode) | <5x10-8 mbar·L/s |
| Max. Inlet Pressure (MASSIVE Mode) | atm (~1013 mbar) |
| Type of Roughing Pump | Roots |
| Max. Helium Pumping Speed (ULTRA Mode) | >36 L/s |
| Response Time for 50 L | 1.4 s |
| Evacuation Time to 1 mbar (50 L) | 52 s |
| Run Up Time | < 2 min |
| Inlet Flange | DN63 ISO-K |
| Detectable Masses | 2, 3, 4 (H2, 3He, He) |
| Supply Voltage | 100 to 230 V, 50/60 Hz |
| Power Consumption (Max. / Typ.) | 1500 VA / 700 VA |
| Dimensions (L x W x H) | 1050 x 427 x 1040 mm |
| Weight | 143 kg |