INFICON VSC150A Vacuum Switch

VSC150A is an absolute pressure vacuum switch with an adjustable switching point. Its mechanical diaphragm design holds its accuracy through short overloads, and it serves valve and pump control, load locks and process chambers.

INFICON VSC150A Vacuum SwitchINFICON VSC150A Vacuum Switch 2

Specifications

Switching Range0.5…2000 mbar
Overload Limit3000 mbar
Switching Hysteresis0.5 mbar
Operating Temperature (in operation)5…90°C
Protection RatingIP 65
Response Sensitivity0.1 mbar
Bakeout120 °C (max. 8 h)
Switch Contactn.c., 24 V / 10 mA, contact resistance <1 Ω
Switching Point Temperature Coefficient0.4 %/K
Storage Temperature-20 … +70 °C
Weight1.3 kg
ConnectionDN 16 ISO-KF

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