| Body Material | Stainless steel |
| Seal Material | FPM(FKM) |
| Controllable Gas Flow | 5 x 10-6 – 1000 mbar x l/s |
| Tightness | 1 x 10-9 mbar x l/s |
| Differential Pressure | 2.5 bar |
| Dead Volume | 0.032 cm3 |
| Operating Temperature | 80 °C |
| Bakeout (flange) | 150 °C |
| Connection | DN 16 ISO-KF |
| Weight | 0.4 kg |
| Needle Sleeve Material | fluorplastomer (as printed) |