Model: AMD※1M
The AMD*1M Series is a metal-free air operated valve designed for strong acid lines, including hydrochloric acid and hydrofluoric acid, in semiconductor manufacturing. It is normally closed and has a fluid temperature range of 5 to 40 °C.
| AMD31M, AMD51M | Actuation | NC (normally closed) |
| AMD31M, AMD51M | Working fluid | Chemical liquids, pure water, air, N2 gas |
| AMD31M, AMD51M | Fluid temperature (°C) | 5 to 40 |
| AMD31M, AMD51M | Proof pressure (MPa) | 1.0 |
| AMD31M, AMD51M | Working pressure (A→B) (MPa) | 0 to 0.5 |
| AMD31M, AMD51M | Valve seat leakage (cm3/min) | 0 (water pressure) |
| AMD31M, AMD51M | Back pressure (MPa) | 0 to 0.5 |
| AMD31M, AMD51M | Ambient temperature (°C) | 0 to 40 |
| AMD31M, AMD51M | Frequency (AMD31M) | 20 cycle/min. or less |
| AMD31M, AMD51M | Frequency (AMD51M) | 15 cycle/min. or less |
| AMD31M, AMD51M | Mounting orientation | Unrestricted |
| AMD31M, AMD51M | Operating pressure (MPa) | 0.4 to 0.6 |
| AMD31M, AMD51M | Operating port | Rc1/8 |
| AMD31M, AMD51M | Weight (AMD31M) (kg) | 0.33 |
| AMD31M, AMD51M | Weight (AMD51M) (kg) | 1.0 |