A stainless vacuum valve with a formed bellows stem seal. It is single-acting, opened by air and closed by a spring, with a polished SS304 body and KF flanges. Angle, Y-inline and 2-stage types are available, and the last one gives a soft initial evacuation that reduces particulate contamination during early turbulent evacuation.
| Type | Angle (ZFP0081520040K00), Y-inline (ZFP0081620040K00), 2-stage (35011311001A) |
| Actuation Type | Single-acting pneumatic, air to open, spring to close |
| Material | Body polished SS304, bonnet seal FKM |
| Compressed Air Pressure | 4 to 6 kg/cm² |
| Vacuum Rating | 10⁻⁹ mbar (FKM seal bonnet, KF flange) |
| End Connection | KF flange |
| Size | O.D. 38.1 mm (1.50") |
| Mounting Orientation | Any |