HTC APC Pendulum Valve (Step Motor)

The HTC APC pendulum valve is a vacuum valve installed between the process chamber and the turbomolecular pump, handling both chamber pressure control and isolation. A step motor and an integrated controller run it in pressure control mode or position control mode, and it connects with ISO200, ISO250 and ISO320 flanges. It is used on the exhaust line of CVD and etch processes in semiconductor, display (FPD) and solar cell manufacturing equipment.

Features

HTC APC Pendulum Valve (Step Motor)HTC APC Pendulum Valve (Step Motor) 2HTC APC Pendulum Valve (Step Motor) 3

Specifications

Body MaterialA6061-T6
Gate MaterialA6061-T6
ConnectionISO200/ISO250/ISO320 flange
ActuatorStep motor
Control ModePressure control, position control
CommunicationRS232 (RS485 optional)
Analog I/OSensor input 0 to 10 V, 2 channels; analog output 0 to 10 V, 2 channels
Power24 VDC (±10%), 150 W power consumption
Control Accuracy0.1% of maximum sensor range
Position Resolution8,000 steps
Helium Leak Rate (1 atm differential)Aluminum body < 1×10⁻⁹ mbar·L/s; hard-anodized body < 1×10⁻⁵ mbar·L/s
Pressure RangeAluminum body 1×10⁻⁸ mbar to 1.2 bar; hard-anodized body 1×10⁻⁶ mbar to 1.2 bar
Maximum Differential Pressure1.2 bar (5 mbar or less during opening)
Bake TemperatureBody ≤120℃, actuator ≤70℃
Life Cycle200,000 open/close cycles; 1,000,000 pressure control cycles
SealViton O-ring (gate/bonnet)
WeightISO200 22 kg, ISO250 31 kg, ISO320 51 kg
Mounting PositionHorizontal, vertical
OptionsOther gate O-ring material; heater with insulation (hard-anodized type)

Frequently Asked Questions

Do I need to prepare the vacuum gauge and the controller separately?
The controller comes mounted on the valve, so only the vacuum gauge is prepared separately and it must match the sensor port specification. A gauge with a linear 0 to 10 V output that runs on a 24 VDC or ±15 VDC (500 mA) sensor supply can be connected.
How do the aluminum body and the hard-anodized body differ in specification?
The aluminum body has a helium leak rate below 1×10⁻⁹ mbar·L/s and a pressure range of 1×10⁻⁸ mbar to 1.2 bar. The hard-anodized body has a helium leak rate below 1×10⁻⁵ mbar·L/s and a pressure range of 1×10⁻⁶ mbar to 1.2 bar. Both leak rates are the manufacturer's catalog values at 1 atm differential.
Which communication methods are supported?
The interface connector provides RS232 as standard and RS485 as an option. The same connector carries two 0 to 10 V analog output channels and two channels each of digital input and output.
What happens when power is lost?
The controller has backup power, and the power failure protection behavior is set in the software.
How can I check whether it fits existing equipment?
Port diameter, flange O.D. and bolt P.C.D. can be compared against the dimension table first. Valve length, controller position and communication with the tool's control program are checked against the drawing and specification. Even at the same nominal size, fit cannot be confirmed before the drawing is reviewed.