A large pendulum valve installed between the process chamber and the turbomolecular pump inlet. ISO200, ISO250 and ISO320 flanges are available, it runs in pneumatic, 3-Position or APC mode, and it is used in OLED, FPD and PV manufacturing systems.
| Body Material | A6061-T6 |
| Connection | ISO200/ISO250/ISO320 flange |
| Working Pressure | 1×10-8 mbar ~ 1.2 bar |
| Operating Temperature (bake) | Body ≤120℃, actuator ≤80℃, solenoid valve ≤50℃ |
| Seat Material | FKM O-ring (gate/bonnet) |
| Actuation Type | Electro-Pneumatic |