A butterfly valve that isolates or regulates a vacuum line by turning a disk. It is light, needs less support and opens and closes quickly. Manual, pneumatic and electric actuation are available, and the pneumatic type serves as an isolation valve between the pump and the process chamber in FPD, semiconductor and PVD processes. When fully open the disk protrudes from the body, so check the minimum ID of the connecting duct before installation.
| Actuation Type | Manual, pneumatic, electric |
| Material | Body, plate and shaft SS304, gate seal and shaft seal FKM (pneumatic type) |
| Mounting Orientation | Any |
| Cycle Life | KF25 to KF50 1,500,000 cycles, ISO63 to ISO160 1,500,000 cycles, ISO200 to ISO250 1,000,000 cycles |
| Plate O-ring Cycle Life | KF25 to KF50 250,000 cycles, ISO63 to ISO160 250,000 cycles, ISO200 to ISO250 200,000 cycles |
| Helium Leak Rate | Below 1×10⁻⁹ mbar·l/s (1 atm differential) |
| Pressure Range | 1×10⁻⁸ mbar to 2 bar (either direction) |
| Differential Pressure | 2 bar or less (either direction) |
| Maximum Differential Pressure During Opening | Below 1 bar |
| Compressed Air Connection | KF25 to ISO63 2×1/8" NPT, ISO100 to ISO250 2×1/4" NPT |
| Compressed Air Pressure | 4 to 6 bar |
| Weight | KF25 1.3 kg, KF40 2.3 kg, KF50 2.6 kg, ISO63 4.2 kg, ISO100 5.2 kg, ISO160 9.8 kg, ISO200 17.8 kg, ISO250 15.1 kg |
| Note | Cycle life applies at 25 ℃ in a clean environment with an opening differential pressure below 10 mbar |