MAG470 is an inverted magnetron cold cathode vacuum gauge that measures by ionization without a filament. Its metal-sealed design serves ultra-high vacuum monitoring and base pressure measurement in evaporation and sputtering systems, and it is easy to clean.
| Measuring Range | 5×10⁻¹¹ … 1×10⁻² mbar (3.8×10⁻¹¹ … 7.5×10⁻³ Torr) |
| Accuracy | ≈±30% of reading (1×10⁻⁹…1×10⁻³ mbar) |
| Supply Voltage (gauge) | +15…+30 V(dc) |
| Bakeout (extended) | +250°C |
| Allowable Pressure (absolute) | ≤10 bar (limited inert gases) |
| Repeatability | ≈±5% (1×10⁻⁹…1×10⁻³ mbar) |
| Operating Temperature | +5…+55 °C |
| Storage Temperature | -40…+65 °C |
| Power Consumption | ≤2 W |
| Output | 0…+10.5 V log 0.8 V/decade (measuring range +1.96…+8.6 V) |
| Response Time | p>10⁻⁶ mbar <10 ms |
| Weight | approx. 950 g (MAG470), approx. 1100 g (MAG470 extended) |
| Protection Rating | IP40 |
| Bakeout | +250°C (without electronics and magnetic shield) |