PEG100 is a Penning (cold cathode) vacuum gauge that measures from medium to ultra-high vacuum. It has no filament and uses titanium cathode plates, and it lowers the high voltage after plasma ignition to reduce contamination risk even in argon sputtering. Besides the logarithmic analog output, DeviceNet and Profibus DP models are available for easy integration into equipment.
| Measuring System | Penning cold cathode |
| Measurement Range | 1×10⁻⁹ to 1×10⁻² mbar (7.5×10⁻¹⁰ to 7.5×10⁻³ Torr) |
| Accuracy (10⁻⁸ to 10⁻⁴ mbar) | ±30 % of reading |
| Max. Pressure (Absolute) | 10 bar |
| Operating Temperature (Ambient) | +10 to +50 °C |
| Storage Temperature | -20 to +75 °C |
| Bakeout (Without Electronics) | 350 °C |
| Bakeout (With Electronics, at Flange) | 70 °C |
| Supply Voltage | 14.5 to 36 V (dc) |
| Power Consumption | < 2 W max. |
| Analog Output | 0 to 10.6 V (measurement range 0.66 to 10 V, 1.333 V/decade) |
| Connector | FCC 68, female, 8 pin (shielded) |
| Cable Length (Analog) | max. 100 m |
| Materials Exposed to Vacuum | Stainless steel, CrNi, Al₂O₃, NiFe, Mo, Cu, Ni, Ti |
| Internal Volume | 21 cm³ |
| Weight | approx. 500 g |
| Protection Type | IP40 |
| Flange Connection | DN 25 ISO-KF / DN 40 CF-F |
| Fieldbus Options | DeviceNet (PEG100-D) / Profibus DP (PEG100-P, DN 25 ISO-KF) |