INFICON PEG050 Penning Vacuum Gauge

PEG050 is a passive Penning (cold cathode) vacuum gauge with no filament to burn out. It uses titanium cathode plates and lowers the high voltage after the plasma ignites, so it can also be used in sputtering processes. The cathode plate and anode ring can be taken apart for cleaning or replacement, and it connects to the VGC023 controller.

INFICON PEG050 Penning Vacuum GaugeINFICON PEG050 Penning Vacuum Gauge 2

Specifications

Measuring SystemPenning cold cathode
Measurement Range1×10⁻⁹ to 1×10⁻² mbar (0.75×10⁻⁹ to 10⁻² Torr)
High Voltage (Anode Potential)+3.3 / +1.6 kV
Operating Temperature (Ambient)0 to +80 °C
Storage Temperature-25 to +80 °C
Max. Pressure (Absolute)6 bar
Internal Volume21 cm³
Materials Exposed to VacuumStainless steel, CrNi, Al₂O₃, Ti
Flange ConnectionDN 25 ISO-KF / DN 40 ISO-KF
Weightapprox. 0.3 kg (DN 25) / approx. 0.4 kg (DN 40)