BAG302 is a Bayard-Alpert hot cathode ion vacuum gauge. It combines two yttria coated iridium filaments, an OLED display, a setpoint relay and RS485 communication in one body for semiconductor process and transfer chambers.
| Measuring Range | 1.3×10⁻⁹ … 6.7×10⁻² mbar (1×10⁻⁹ … 5×10⁻² Torr) |
| Accuracy | ±15% of reading (1.3×10⁻⁸…6.7×10⁻² mbar) |
| Supply Voltage | +20…+28 V (dc) |
| Interface (digital) | RS485 |
| Operating Temperature (in operation) | 0…+40°C |
| Filament | Two Yt2O3 coated Ir |
| Bakeout (sensor only) | Flange 200°C (sensor only, electronics removed) |
| Repeatability | ±5% (of reading) |
| Weight | KF/CF 270 g (0.6 lb) |
| Storage Temperature | -40…+70°C |