Spot CDS530D is a ceramic capacitance diaphragm sensor that pairs two miniature sensors for a wider measuring range. It is built into tight spaces inside vacuum instruments, outputs a digital SPI signal and responds quickly.
| Full Scale | 1000 / 300 / 100 / 30 / 10 Torr |
| Measuring Range | 0.1 … 100 % FS |
| Accuracy | 0.5 % of reading |
| Operating Temperature (in operation) | 0 … 60 °C |
| Maximum Pressure (absolute) | 400 kPa |
| Supply Voltage | 5 ± 0.25 V (dc) |
| Interface (digital) | SPI |
| Response Time | 2 ms (10 … 90%) |
| Materials Exposed to Vacuum | Ceramics (Al₂O₃), AISI 316L |
| Sensor Configuration | Dual sensor (Sensor 1 & 2), accuracy 0.5% each |
| Long-term Stability | 0.5% FS/year |
| Compensated Temperature Range | 10…50 °C |
| Burst Pressure (absolute) | 800 kPa |
| Power Consumption | <0.05 W (operating) |
| Dimensions (for information only) | 25.5 x 20.5 x 31 mm (excluding flex cable) |