INFICON SKY CDG025D Capacitance Diaphragm Gauge

SKY CDG025D is a temperature compensated capacitance diaphragm vacuum gauge for ambient use. Its corrosion-resistant ceramic sensor holds its zero through millions of pressure cycles and settles quickly after power-on, for semiconductor equipment.

INFICON SKY CDG025D Capacitance Diaphragm GaugeINFICON SKY CDG025D Capacitance Diaphragm Gauge 2

Specifications

Full Scale1000/1100…200 / 100…5 / 2…0.5 / 0.25 / 0.1 Torr/mbar
Accuracy0.2 % of reading (1000/1100...200, 100...5, 2...0.5) / 0.25 % of reading (0.25) / 0.5 % of reading (0.1)
Supply Voltage+14…+30 V (dc)
Electrical ConnectionD-sub, 15-pin, male
Protection RatingIP 30
Operating Temperature+5…+50℃
BakeoutFlange, not operating ≤110℃
Storage Temperature-40…+65℃
Response Time30 ms (1000/1100…0.25), 130 ms (0.1)
Weight285…342 g