SKY CDG100D is a capacitance diaphragm vacuum gauge whose sensor is heated to 100°C to keep process deposits from building up. Its corrosion-resistant ceramic diaphragm serves semiconductor etch and deposition and plasma processes.
| Full Scale | 1000/1100…200 / 100…1 / 0.5…0.25 / 0.1 Torr/mbar |
| Accuracy | 0.2% of reading (FS 1000/1100…200 and 100…1) / 0.4% of reading (FS 0.5…0.25 and 0.1) |
| Supply Voltage | +14…+30 V(dc) or ±15V(±5%) |
| Protection Rating | IP 40 |
| Operating Temperature (in operation) | +10…+50°C |
| Electrical Connection | D-sub 15-pin male (2SP) |
| Bakeout | ≤110℃ |
| Storage Temperature | -20…+65℃ |
| Power Consumption | Heating ≤15 W, operating ≤10 W |
| Weight | 892…964 g |
| Interface | DeviceNet, Profibus DP, PROFINET, EtherCAT, 4-20mA (option) |
| Note | Above 40℃ ambient, surface temperature may exceed SEMI S2 |