INFICON SKY CDG045D Capacitance Diaphragm Gauge

SKY CDG045D is a capacitance diaphragm vacuum gauge whose sensor is heated to 45°C for steady readings. It uses a corrosion-resistant ceramic diaphragm and reads pressure regardless of gas type for semiconductor processes and reference measurement.

INFICON SKY CDG045D Capacitance Diaphragm GaugeINFICON SKY CDG045D Capacitance Diaphragm Gauge 2

Specifications

Full Scale1000/1100…200 / 100…1 / 0.5…0.25 / 0.1…0.05 Torr/mbar
Accuracy0.15% of reading
Supply Voltage+14…+30 V(dc) or ±15V(±5%)
Protection RatingIP 40
Operating Temperature (in operation)+10…+40°C
Bakeout≤110℃
Storage Temperature-20…+65℃
Power ConsumptionHeating ≤12 W, operating ≤8 W
Weight870…942 g
InterfaceDeviceNet, Profibus DP, PROFINET, EtherCAT, 4-20mA (option)