SKY CDG200D is a capacitance diaphragm vacuum gauge whose sensor is heated to 200°C to keep process deposits from building up. Its corrosion-resistant ceramic diaphragm serves semiconductor etch and deposition and corrosive high-temperature processes.
| Accuracy | 0.4% of reading |
| Supply Voltage | +21…+30 V (dc) or ±15 V (±5%) |
| Bakeout (flange) | ≤200°C |
| Power Consumption (in operation) | ≤18 W |
| Protection Rating | IP 40 |
| Full Scale | 1…1000 Torr or 1…1100 mbar (sensor temperature 200°C) |
| Power Consumption (heating) | ≤25 W |
| Operating Temperature (ambient) | +10…+50 °C |
| Maximum Pressure (absolute) | 400 kPa (FS 1000/1100…200), 260 kPa (FS 100…1) |
| Response Time | 30 ms |
| Weight | 891…964 g |