SKY CDG160D is a capacitance diaphragm vacuum gauge whose sensor is heated to 160°C to keep process deposits from building up. Its corrosion-resistant ceramic diaphragm suits semiconductor etch and deposition and corrosive high-temperature processes.
| Accuracy | 0.4% of reading |
| Supply Voltage | +21…+30 V (dc) or ±15 V (±5%) |
| Bakeout (flange) | ≤200°C |
| Protection Rating | IP 40 |
| Electrical Connection | D-Sub, 15-pin, male |
| Full Scale | 1000/1100…200, 100…1 Torr/mbar |
| Operating Temperature | +10…+50℃ |
| Storage Temperature | -20…+65℃ |
| Power Consumption | Heating ≤18 W, operating ≤12 W |
| Weight | 891…964 g |