Edge CDG045D2 is a compact heated capacitance diaphragm vacuum gauge. A sensor shield blocks process by-products, the outer surface stays cool and EtherCAT communication is optional, for CVD, etch and PVD processes.
| Full Scale | 1000/1100…200 / 100…1 Torr/mbar |
| Accuracy | 0.2% of reading |
| Supply Voltage | +14…+30 V(dc) or ±15V(±5%) |
| Protection Rating | IP 40 |
| Operating Temperature (in operation) | +10…+40°C |
| Electrical Connection | D-sub 15-pin male (2SP) |
| Bakeout | ≤110℃ |
| Power Consumption | Heating ≤12 W, operating ≤8 W |
| Response Time | 30 ms |
| Weight | 540…610 g |
| Diagnostic Port | RS232-C |