INFICON Stripe CDG100Dhs Heated Capacitance Diaphragm Gauge

Stripe CDG100Dhs is a high-speed heated capacitance diaphragm vacuum gauge with a response time under 2 ms. It has EtherCAT communication and a heated sensor for high-temperature processes such as ALD, PVD, CVD and etch.

INFICON Stripe CDG100Dhs Heated Capacitance Diaphragm GaugeINFICON Stripe CDG100Dhs Heated Capacitance Diaphragm Gauge 2

Specifications

Full Scale1000/1100 / 500…1 / 0.5…0.1 Torr/mbar
Accuracy0.2% of reading (1000/1100, 500…1 range) / 0.4% (0.5…0.1)
Response Time2…20 ms
Supply Voltage+14…+30 V(dc) or ±15V(±5%)
Protection RatingIP 30
Operating Temperature+10…+50℃
Bakeout≤110℃
Storage Temperature-20…+85℃
Power ConsumptionHeating ≤16 W, operating ≤11 W
Weight962…1019 g
Diagnostic PortUSB
CommunicationEtherCAT