Edge CDG100D2 is a compact heated capacitance diaphragm vacuum gauge. A sensor shield blocks process by-products and the outer surface stays cool, for CVD, etch and PVD semiconductor processes.
| Full Scale | 1000/1100…200 / 100…1 Torr/mbar |
| Accuracy | 0.2% of reading |
| Supply Voltage | +14…+30 V(dc) or ±15V(±5%) |
| Protection Rating | IP 40 |
| Operating Temperature (in operation) | +10…+50°C |
| Electrical Connection | D-sub 15-pin male (2SP) |
| Bakeout | ≤110℃ |
| Storage Temperature | -20…+65℃ |
| Power Consumption | Heating ≤20 W, operating ≤14 W |
| Response Time | 30 ms |
| Weight | 552…622 g |
| Option | EtherCAT |