INFICON Edge CDG025D2 Heated Capacitance Diaphragm Gauge

Edge CDG025D2 is an ambient capacitance diaphragm vacuum gauge with EtherCAT communication. Its temperature compensated ceramic sensor and sensor shield keep readings steady over time, for CVD, etch, PVD and ALD equipment.

INFICON Edge CDG025D2 Heated Capacitance Diaphragm GaugeINFICON Edge CDG025D2 Heated Capacitance Diaphragm Gauge 2

Specifications

Full Scale1000/1100…200 / 100…5 / 2…0.5 / 0.25 / 0.1 Torr/mbar
Accuracy0.2% of reading (1000/1100…200, 100…5, 2…0.5 range) / 0.25% (0.25) / 0.5% (0.1)
Supply Voltage+14…+30 V(dc) or ±15V(±5%)
Protection RatingIP 40
Operating Temperature+5…+50℃
Bakeout≤110℃
Response Time30 ms, 130/30 ms
Weight552…622 g
Diagnostic PortRS232-C